Cooling water jet pack for high power rotary cathodes
US9512516B1 · kind B1 · utility
1Cited by
7References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 23, 2010 |
| Grant date | Dec 6, 2016 |
| Priority date | — |
| Expiry date | Nov 24, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/332
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A sputtering target assembly, including a cylindrical backing tube, a magnet assembly disposed within the backing tube, and a conduit disposed within the backing tube and adapted for transporting coolant. The conduit includes at least one first opening positioned for providing the coolant in a substantially circumferential direction from the conduit toward an inner surface of the backing tube into a gap volume between a front side of the magnet assembly and the inner surface of the backing tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.