MEMS device calibration
US9513184B2 · kind B2 · utility
2Cited by
3References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2014 |
| Grant date | Dec 6, 2016 |
| Priority date | — |
| Expiry date | Oct 10, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
One example discloses a MEMS device, including: a cavity having an internal environment; a seal isolating the internal environment from an external environment outside the MEMS device; wherein the seal is susceptible to damage in response to a calibration unsealing energy; wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment; and a calibration circuit capable of measuring the internal environment before and after damage to the seal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.