Surface features by azimuthal angle
US9513215B2 · kind B2 · utility
2Cited by
61References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 3, 2013 |
| Grant date | Dec 6, 2016 |
| Priority date | — |
| Expiry date | Jan 4, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided herein is an apparatus, including a photon emitter configured to emit photons onto a surface of an article at a number of azimuthal angles; and a processing element configured to process photon-detector-array signals corresponding to photons scattered from surface features of the article and generate one or more surface features maps for the article from the photon-detector-array signals corresponding to the photons scattered from the surface features of the article.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.