Patent · US Active

Microelectrochemical sensor and method for operating a microelectrochemical sensor

US9513250B2 · kind B2 · utility

0Cited by

0References

10Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Richard Fix · Gerlingen, DE
Andreas Krauss · Lörrach, DE
Kathy Sahner · Mannheim, DE
Denis Kunz · Untergruppenbach, DE
Philipp Nolte · Gerlingen, DE

Key dates

Filing date	Mar 18, 2014
Grant date	Dec 6, 2016
Priority date	—
Expiry date	Mar 4, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01N27/409
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A microelectrochemical sensor includes a carrier material composed of a semiconductor substrate, and includes a chemosensitive sensor element. The chemosensitive sensor element is positioned in a first partial region of the carrier material. A heating element is positioned in a region of the chemosensitive sensor element and is configured to regulate a temperature of the chemosensitive sensor element. A microelectronic unit is positioned in a second partial region of the carrier material, and is connected to the chemosensitive sensor element and the heating element via conductor tracks integrated into the carrier material. The microelectronic unit is configured to operate the heating element and the sensor element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.