Rotary resonant three-dimensional electric field sensor
US9513323B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2013 |
| Grant date | Dec 6, 2016 |
| Priority date | — |
| Expiry date | Jan 2, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R29/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A rotary resonant three-dimensional electric field sensor is disclosed. The rotary resonant three-dimensional electric field sensor includes: a substrate (1); an X-direction electric field measurement unit (4), a Y-direction electric field measurement unit (5), and a Z-direction electric field measurement unit (6), set on the substrate (1), each of which including: a sensing electrode (8, 10, 13) fixed on the substrate (1), and a shielding electrode (7, 9, 12) vibrating relatively to the sensing electrode (8, 10, 13); and at least one set of driving mechanical structures (11, 18), is configured to generate a driving force so as to cause the shielding electrode (7, 9) to vibrate relatively to a corresponding sensing electrode (8, 10, 13), and the vibration is transferred to the shielding is electrodes (7, 9, 12) of the other two electric field measurement units (4, 5, 6).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.