Patent · US Active

Systems and methods for fabricating displacement scales

US9513412B2 · kind B2 · utility

1Cited by
46References
28Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 18, 2008
Grant dateDec 6, 2016
Priority date
Expiry dateJan 18, 2032

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/0005
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Methods and systems for forming a displacement scale comprising TIR prisms on a substrate are described. A system for forming the displacement scale includes one or more rollers having a pattern of total internal reflection (TIR) prism features in negative relief. As the rollers are rotated, the scale is formed on the substrate. The rollers may also include pattern features in negative relief. Rotation of the rollers simultaneously forms the displacement scale and the pattern features on the substrate. The TIR prism features of the displacement scale may be oriented to provide measurement of one or more of lateral displacement, longitudinal displacement and angular displacement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.