Patent · US Active

Damping device

US9513452B2 · kind B2 · utility

3Cited by

18References

34Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Alexander Vogler · Aalen, DE
Klaus Rief · Aalen, DE
Andreas Frommeyer · Schwäbisch Gmünd, DE
Alan L. Brydon · Erding, DE

Key dates

Filing date	Jul 18, 2011
Grant date	Dec 6, 2016
Priority date	—
Expiry date	Mar 24, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/709
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A damping device of an optical element of a projection exposure machine includes at least two mass dampers arranged spaced apart from one another, the vibration absorbers each having at least one damper mass and at least one damping element and the damper masses of the at least two mass dampers being interconnected by at least one connecting element. The optical element can be part of a projection exposure machine.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.