Patent · US Active

Fixture drying apparatus and method

US9514972B2 · kind B2 · utility

2Cited by
15References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 28, 2009
Grant dateDec 6, 2016
Priority date—
Expiry dateMay 18, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/67051
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Wafer carrier washing and drying apparatus and method, especially useful for the semiconducting industry.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.