Membrane-based nano-electromechanical systems device and methods to make and use same
US9515580B2 · kind B2 · utility
5Cited by
3References
19Claims
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Key dates
| Filing date | Jun 19, 2013 |
| Grant date | Dec 6, 2016 |
| Priority date | — |
| Expiry date | Jun 19, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/774
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.