Acoustic sensing apparatus and method of manufacturing the same
US9516421B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 18, 2015 |
| Grant date | Dec 6, 2016 |
| Priority date | — |
| Expiry date | Dec 18, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/48137
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An acoustic sensing apparatus includes a diaphragm; a support structure surrounding the diaphragm and a gap disposed there between, the diaphragm and support structure separating a front volume and a back volume; one or more cantilevers disposed in the gap and between the diaphragm and the support structure, a first end of each of the cantilevers coupled to the support structure and being non-moving, and a second end of each of the cantilevers being free to move; a sealing material covering at least the gap between the diaphragm and the support structure, the sealing material creating an acoustic seal between the front volume and the back volume; and a sensor that converts a diaphragm movement into an electrical signal. The second end of each of the cantilevers is coupled to the sealing material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.