Patent · US Active

Membrane arrangement for a microelectromechanical measuring transducer and method for producing a membrane arrangement

US9516423B2 · kind B2 · utility

3Cited by

1References

20Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Mike Daley · Schoutenkamp, US
Rolf Scheben · Stuttgart, DE
Christoph Schelling · Stuttgart, DE

Key dates

Filing date	Mar 5, 2013
Grant date	Dec 6, 2016
Priority date	—
Expiry date	May 18, 2033

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/0127
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

The disclosure relates to a micro-electromechanical membrane arrangement with a substrate, which has a multiplicity of recesses on a surface, a first electrically conductive electrode layer, which is arranged on the surface of the substrate and has a multiplicity of first depressions coinciding with the recesses, and an electrically conductive membrane layer, which can be deflected in a direction perpendicular to the active surface of the substrate, is arranged over the first electrode layer and is kept at a distance therefrom by a first distance value.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.