Patent · US Active

UV irradiation device for clocked operation

US9517490B2 · kind B2 · utility

0Cited by

12References

9Claims

0Family size

Assignee

Oerlikon Surface Solutions AG, Pfäffikon · CH

Inventors

Carlos Ribeiro · Ngọc Lặc, VN
Tasso Karsch · Waiblingen, DE
Rüdiger Schäfer · Mutterstadt, DE
Martin Kaspar · Fellbach, DE

Key dates

Filing date	Oct 22, 2013
Grant date	Dec 13, 2016
Priority date	—
Expiry date	Oct 22, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG02B5/283
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An irradiation device including at least one radiation source, which emits both UV-radiation and W-radiation, i.e. visible light and/or IR radiation. The device includes a transport device for delivering substrates to be irradiated. At least one wavelength-selective filter reflects UV-radiation at an angle of 45° and transmits W-radiation. Means for the absorption of IR radiation are arranged downstream of the optical filter in the propagation direction in the beam path of the W-radiation not deflected by the wavelength-selective filter. The means for the absorption of IR radiation are also designed to absorb visible light and UV rays, and the irradiation device includes movement means in order to guide the wavelength-selective filter into and out of the beam path of the radiation source.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.