Micro-electro-mechanical device and method for making the same
US9518884B2 · kind B2 · utility
3Cited by
3References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 9, 2013 |
| Grant date | Dec 13, 2016 |
| Priority date | — |
| Expiry date | May 13, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/003
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a micro-electro-mechanical device which includes a substrate, an electrode, and a diaphragm. The electrode includes plural vent holes. The diaphragm is disposed above and in parallel to the electrode, to form a capacitive sensor with the electrode. The diaphragm includes plural ribs protruding upward and/or downward from the diaphragm; the ribs are respectively disposed in correspondence to the plural vent holes and do not overlap nor contact the electrode. A method for making the micro-electro-mechanical device is also provided according to the present invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.