Particle detector and method for producing such a detector
US9518909B2 · kind B2 · utility
2Cited by
4References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 25, 2014 |
| Grant date | Dec 13, 2016 |
| Priority date | — |
| Expiry date | Sep 25, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a particle detector including a substrate made of a semiconductor material, in which at least one through-cavity is formed, defined by an input section and an output section, wherein the input section thereof is to be connected to an airflow source, the substrate supporting: an optical means including at least one laser source, and at least one waveguide connected to the at least one laser source and leading into the vicinity of the output section of the cavity; and a photodetector located near the output section of the cavity and offset relative to the optical axis of the optical means.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.