Mass transfer tool manipulator assembly with remote center of compliance
US9522468B2 · kind B2 · utility
2Cited by
67References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 8, 2014 |
| Grant date | Dec 20, 2016 |
| Priority date | — |
| Expiry date | Oct 22, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20354
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.