Patent · US Active

Integrated circuit comprising a gas sensor

US9523651B2 · kind B2 · utility

6Cited by

6References

14Claims

0Family size

Assignee

AMS INTERNATIONAL AG · CH

Inventors

Aurelie Humbert · Brussels, BE
Roel Daamen · Herkenbosch, NL

Key dates

Filing date	Sep 10, 2013
Grant date	Dec 20, 2016
Priority date	—
Expiry date	Oct 31, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG01N27/125
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate. The integrated circuit also includes an electrical impedance based gas sensor located on the substrate. The sensor includes first and second electrically conductive sensor electrodes. Each sensor electrode is enclosed in an electrically conductive corrosion protection material. The sensor also includes a gas sensitive material located between the sensor electrodes. The impedance of the gas sensitive material is sensitive to a gas to be sensed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.