Magnetic sensor and method of manufacturing the same
US9523745B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 10, 2016 |
| Grant date | Dec 20, 2016 |
| Priority date | — |
| Expiry date | Feb 10, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N52/80
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided are a magnetic sensor and a method of manufacturing the same capable of arranging a magnetic converging plate on a substrate on which Hall elements and a circuit are formed, with a small variation in position while suppressing an increase in number of work processes, the magnetic converging plate having high magnetic permeability and low coercive force. In the magnetic sensor and the method of manufacturing the same, in forming Hall elements and a circuit on a silicon substrate, a magnetic converging plate holder having a pattern recessed to have the same shape and size as those of a magnetic converging plate is formed, and, into the magnetic converging plate holder, the magnetic converging plate manufactured through processes different from those of the silicon substrate on which the Hall elements and the circuit are formed is inserted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.