Patent · US Active

System and method for direct imaging

US9523873B2 · kind B2 · utility

0Cited by

14References

11Claims

0Family size

Assignees

Orbotech Ltd. · IL
Laser Imaging Systems GmbH & Co. KG · DE

Inventors

Stefan Heinemann · Ann Arbor, US
Wolfgang Retschke · Jena, DE
Holger Wagner · Mettenberg, DE
Jonas Burghoff · Apolda, DE
Abraham Gross · Rehovot, IL

Key dates

Filing date	Jan 23, 2015
Grant date	Dec 20, 2016
Priority date	—
Expiry date	Jan 23, 2035

Classification

Technology area (CPC H)Electricity
CPC primaryH04N1/0443
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.