CXNYHZ film, deposition method, magnetic recording medium and method for manufacturing the same
US9524742B2 · kind B2 · utility
1Cited by
1References
17Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 24, 2011 |
| Grant date | Dec 20, 2016 |
| Priority date | — |
| Expiry date | Oct 24, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/8408
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
To provide a CxNyHz film of high density and a deposition method. One aspect of the present invention is a CxNyHz film formed on a substrate to be deposited,
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.