In-chamber fluid handling system and methods handling fluids using the same
US9524856B2 · kind B2 · utility
11Cited by
10References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2014 |
| Grant date | Dec 20, 2016 |
| Priority date | — |
| Expiry date | Jun 29, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sample chamber is configured to accommodate a target such that a portion of the target is removable as a sample. A carrier gas injection system is configured to introduce a carrier gas into the sample region from a first position and a second position within the sample chamber such that at least a portion of the sample is entrainable by the carrier gas within the sample region. A portion of the sample region is located between the first position and the second position. A sample transport conduit is configured to transport at least a portion of the sample entrained by the carrier gas to a location outside the sample chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.