Silicon-on-insulator microchannels for biological sensors
US9524900B2 · kind B2 · utility
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3References
8Claims
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Key dates
| Filing date | Feb 21, 2014 |
| Grant date | Dec 20, 2016 |
| Priority date | — |
| Expiry date | Feb 21, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/762
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Novel methods to fabricate biological sensors and electronics are disclosed. A silicon-on-insulator wafer can be employed by etching a pattern of holes in the silicon layer, then a pattern of cavities in the insulating layer, and then sealing the top of the cavities. Further, n or p doped regions and metallic regions can be defined in the processed wafer, thereby enabling integration of biological sensing and electronic capabilities in the same wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.