Single crystal micromechanical resonator and fabrication methods thereof
US9525398B1 · kind B1 · utility
256Cited by
1References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 27, 2014 |
| Grant date | Dec 20, 2016 |
| Priority date | — |
| Expiry date | Jan 24, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/027
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.