Process for scalable synthesis of molybdenum disulfide monolayer and few-layer films
US9527062B2 · kind B2 · utility
1Cited by
1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 9, 2014 |
| Grant date | Dec 27, 2016 |
| Priority date | — |
| Expiry date | Nov 2, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/50
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present disclosure relates to nanosheet synthesis. More particularly, the present disclosure relates to molybdenum sulfide (MoS2) atomic thin films and hydrogen evolution reactions. In one or more embodiments, a synthesis process may include sublimation of sulfur and MoCl5, reaction of MoCl5 and S to produce gaseous MoS2 species, transfer of the MoS2 species by carrier gas, diffusion of MoS2 species from the gas phase onto receiving substrates, and precipitation of MoS2 on the substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.