Patent · US Active

Process for fabrication of a micromechanical and/or nanomechanical structure comprising a porous surface

US9527729B2 · kind B2 · utility

0Cited by

7References

27Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventor

Eric Ollier · Grenoble, FR

Key dates

Filing date	Feb 18, 2014
Grant date	Dec 27, 2016
Priority date	—
Expiry date	Feb 18, 2034

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/038
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

Process for fabrication of a micromechanical and/or nanomechanical structure comprising the following steps, starting from an element comprising a support substrate and a sacrificial layer:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.