Method and apparatus for dynamic-tuning
US9527733B2 · kind B2 · utility
0Cited by
9References
12Claims
0Family size
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Key dates
| Filing date | Nov 7, 2014 |
| Grant date | Dec 27, 2016 |
| Priority date | — |
| Expiry date | Dec 10, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N2/0095
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A compliant apparatus for nano-manufacture, including a stage for supporting the objects to be nano-manufactured. The stage includes at least one flexural beam and at least one actuator coupled to the flexural beam; and the actuator is configured to generate and apply axial loads onto the flexural beam, such that a natural frequency of the flexural beam is shifted in response to the generated axial loads, so as to allow trade-offs between the natural frequency and a stroke of the stage for nano-manufacturing the objects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.