Chemical vapor deposition using N,O polydentate ligand complexes of metals
US9528182B2 · kind B2 · utility
1Cited by
16References
7Claims
0Family size
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Key dates
| Filing date | Jun 9, 2010 |
| Grant date | Dec 27, 2016 |
| Priority date | — |
| Expiry date | Oct 12, 2031 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/40
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Complexes of metals and N,O polydentate ligands are useful as precursors in the preparation of doped zinc oxide coatings by chemical vapor deposition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.