Optical fiber pressure sensor with uniform diaphragm and method of fabricating same
US9528893B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2010 |
| Grant date | Dec 27, 2016 |
| Priority date | — |
| Expiry date | Dec 18, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1052
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An optical fiber sensor (100) can be used to measure pressure with high sensitivity and fine resolution. As a (108) at the end of the sensor expands or contracts, the spectrum of a beam reflected from the end of fiber shifts, producing a change linked to pressure exerted on the sensor. Novel aspects of the present inventive sensor include the direct bonding of a silica thin film diaphragm (110) to the optical fiber with localized or confined heating and a uniform thickness of the diaphragm. The resulting sensor has a diameter that matches the diameter of the optical fiber. Because the sensor is all silica, it does not from temperature-induced error. In addition, the sensor can be very sensitive because the diaphragm can be very thin; it can also make highly repeatable measurements due to its very uniform thickness.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.