Method for producing a refractive or diffractive optical device

US9529127B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventor

• Michel Heitzmann · Combs-la-Ville, FR

Key dates

• Filing date: Oct 17, 2012
• Grant date: Dec 27, 2016
• Expiry date: May 21, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B2003/0093
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method producing a refractive or diffractive optical device, including: production, in a first layer, of at least one inclined general profile approximated by a staircase profile including plural stairsteps; production of the profile including: forming buffer patterns on the first layer and at least one sequence including: forming masking patterns, so each masking pattern includes at least one edge situated above a buffer pattern and covers at least one area of the first layer not masked by the buffer patterns, the forming the masking patterns also defining, for the first layer, plural free areas not masked by the masking patterns or by the buffer patterns; etching the free areas to form trenches in the first layer. The production of the profile also includes: removing the masking patterns, removing the buffer patterns revealing walls previously covered by the buffer patterns, and then an isotropic etching to remove the walls.