TFT array substrate, manufacturing method thereof, and display device
US9530808B2 · kind B2 · utility
1Cited by
2References
8Claims
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Key dates
| Filing date | Dec 9, 2013 |
| Grant date | Dec 27, 2016 |
| Priority date | — |
| Expiry date | Dec 9, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/0321
Abstract
A method of manufacturing a TFT array substrate and a TFT array substrate and a display device are provided. During a pattern of a gate layer (2), a pattern of the gate insulating layer (3) and a pattern of the active layer are made, a gate layer (2) material, a gate insulating layer (3) material and an active layer material are deposited successively. The gate layer (2), the gate insulating layer (3) and the active layer are made through one patterning process. At least one mask process is saved and the process complexity is reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.