Mask assembly for deposition, deposition apparatus, and method employing the same
US9530961B2 · kind B2 · utility
7Cited by
3References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 28, 2015 |
| Grant date | Dec 27, 2016 |
| Priority date | — |
| Expiry date | Apr 28, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed is a mask assembly for deposition including: a frame having an opening; a mask having at least one pattern part formed in a second direction that is different from a first direction, wherein at least a portion of the mask is supported by the frame and the at least one pattern part has one or more slits continuously formed in the first direction; and at least one support stick extending in the second direction across the opening so as to support at least a portion of the mask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.