CMOS ultrasonic transducers and related apparatus and methods

US9533873B2 · kind B2 · utility

Assignee

• Butterfly Network, Inc. · US

Inventors

• Jonathan M. Rothberg · Paradise, US
• Keith G. Fife · Palo Alto, US
• Tyler S. Ralston · Clinton, US
• Gregory L. Charvat · Guilford, US
• Nevada J. Sanchez · Guilford, US

Key dates

• Filing date: Feb 4, 2014
• Grant date: Jan 3, 2017
• Expiry date: Feb 5, 2035

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2203/0771
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

CMOS Ultrasonic Transducers and processes for making such devices are described. The processes may include forming cavities on a first wafer and bonding the first wafer to a second wafer. The second wafer may be processed to form a membrane for the cavities. Electrical access to the cavities may be provided.