Diamond-like carbon nanorods and fabrication thereof
US9533882B1 · kind B1 · utility
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Key dates
| Filing date | Mar 24, 2011 |
| Grant date | Jan 3, 2017 |
| Priority date | — |
| Expiry date | Oct 2, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2203/0655
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Novel sp3 rich diamond-like carbon (DLC) nanorod films were fabricated by hot filament chemical vapor deposition technique. The results are indicative of a bottom-up self-assembly synthesis process, which results in a hierarchical structure that consists of microscale papillae comprising numerous nanorods. The papillae have diameters ranging from 2 to 4 μm and the nanorods have diameters in the 35-45 nm range. A growth mechanism based on the vapor liquid-solid mechanism is proposed that accounts for the morphological aspects in the micro- and nano-scales.
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