Pressure compensated capacitive micromachined ultrasound transducer for downhole applications
US9534492B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 11, 2014 |
| Grant date | Jan 3, 2017 |
| Priority date | — |
| Expiry date | Apr 18, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01V2210/1429
- WIPO fieldCivil engineering
- WIPO sectorOther fields
Abstract
An apparatus for interrogating a subsurface material includes a carrier configured to be conveyed through a borehole penetrating the earth, an array of acoustic transducers disposed on the carrier and configured to be compensated for ambient pressure in the borehole, and electronics coupled to the array and configured to operate the array to interrogate the subsurface material. Each acoustic transducer in the array includes a substrate, a bottom electrode disposed on the substrate, a top electrode disposed above the bottom electrode, an insulation layer disposed between the bottom electrode and the top electrode and defining a cavity into which the top electrode may deflect, and a pressure compensating fluid disposed in the cavity and in pressure communication with ambient pressure of the array.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.