Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures

US9534848B2 · kind B2 · utility

Assignee

• KLA-TENCOR CORPORATION · US

Inventors

• Jincheng Wang · Nanhu, CN
• Anant Chimmalgi · San Jose, US
• Rajeev Patil · Fremont, US
• Erik Kim · Sunnyvale, US
• Rudolf Brunner · Baldham, DE
• Quang Giang · San Francisco, US
• Lauren Wilson · San Jose, US
• Ken Gross · Vancouver, US
• Ilya Bezel · Mountain View, US
• Dan Scott · Fort Worth, US
• Younus Vora · San Jose, US
• Matthew Derstine · Sunnyvale, US
• Cedric Lasfargues · Castro Valley, US

Key dates

• Filing date: Aug 26, 2013
• Grant date: Jan 3, 2017
• Expiry date: Oct 13, 2034

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F21V19/00
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.