Wavelength-selectable coating thickness measurement apparatus
US9534889B2 · kind B2 · utility
3Cited by
7References
10Claims
0Family size
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Key dates
| Filing date | Oct 3, 2014 |
| Grant date | Jan 3, 2017 |
| Priority date | — |
| Expiry date | Oct 23, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/0666
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is an apparatus that measures a thickness of a coating by selecting a wavelength of a laser based on a color of the coating using a contactless method using a photoacoustic effect and an interferometer, the apparatus including a pulsed laser source to irradiate a pulsed laser beam toward the coating, a continuous wave (CW) laser source to irradiate a CW laser beam toward the coating, a detector to detect an optical interference signal corresponding to the CW laser beam, and a signal processor to process the optical interference signal to calculate a thickness of the coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.