Oscillating voltage of sense electrodes in a MEMS tuning fork gyroscope
US9534896B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 27, 2013 |
| Grant date | Jan 3, 2017 |
| Priority date | — |
| Expiry date | Apr 5, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5726
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode out-of-plane from and proximate a first side of a first proof mass between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode out-of-plane from and proximate a second side of the first proof mass between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode. The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass by first demodulating an out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.