Guide plate for a probe card and probe card provided with same
US9535096B2 · kind B2 · utility
1Cited by
1References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2013 |
| Grant date | Jan 3, 2017 |
| Priority date | — |
| Expiry date | Sep 2, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2889
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
It is an object of the invention to provide a guide plate for a probe card with fine through holes at tight pitches and with increased strength. The guide plate 100 for a probe card includes a metal base 110; first insulation layers 120; and metal layers 130. The metal base 110 has a plurality of through holes 111 to receive probes therethrough, and inner walls of the through holes 111. The first insulation layers 120 are of tuboid shape and provided on the respective inner walls of the through holes 111 of the metal base 110. The metal layers 130 are provided on the first insulation layers 120.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.