Beam imaging sensor and method for using same
US9535100B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2015 |
| Grant date | Jan 3, 2017 |
| Priority date | — |
| Expiry date | Jan 13, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3104
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention relates generally to the field of sensors for beam imaging and, in particular, to a new and useful beam imaging sensor for use in determining, for example, the power density distribution of a beam including, but not limited to, an electron beam or an ion beam. In one embodiment, the beam imaging sensor of the present invention comprises, among other items, a circumferential slit that is either circular, elliptical or polygonal in nature. In another embodiment, the beam imaging sensor of the present invention comprises, among other things, a discontinuous partially circumferential slit. Also disclosed is a method for using the various beams sensor embodiments of the present invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.