Nanostructure and process of fabricating same
US9536737B2 · kind B2 · utility
1Cited by
4References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 1, 2012 |
| Grant date | Jan 3, 2017 |
| Priority date | — |
| Expiry date | Jan 1, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D88/00
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A process of fabricating a nanostructure is disclosed. The process is effected by growing the nanostructure in situ within a trench formed in a substrate and having therein a metal catalyst selected for catalyzing the nanostructure growth, under the conditions in which the growth is guided by the trench. Also disclosed are nanostructure systems comprising a nanostructure, devices containing such systems and uses thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.