Patent · US Active

Nonvolatile semiconductor memory device

US9536898B2 · kind B2 · utility

0Cited by
13References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 28, 2016
Grant dateJan 3, 2017
Priority date
Expiry dateApr 28, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/693

Abstract

A nonvolatile semiconductor memory device of an embodiment includes: a semiconductor layer; a tunnel insulating film that is formed on the semiconductor layer and includes a first organic molecular film including first organic molecules each having an alkyl molecular chain as the main chain; a charge storage layer formed on the tunnel insulating film, the charge storage layer being made of an inorganic material; a block insulating film formed on the charge storage layer; and a control gate electrode formed on the block insulating film.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.