Patent · US Active

Semiconductor devices including contact patterns having a rising portion and a recessed portion

US9536968B2 · kind B2 · utility

6Cited by
3References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 19, 2015
Grant dateJan 3, 2017
Priority date
Expiry dateMay 19, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/76883
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Semiconductor devices may include a gate pattern and a contact pattern disposed on an active region. The contact pattern may include a recessed portion near the gate pattern, and a rising portion away from the gate pattern. The gate pattern may include a gate insulating layer and a gate electrode disposed on the gate insulating layer. An upper surface of the recessed portion may be lower than an upper surface of the rising portion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.