Patent · US Active

Microelectromechanical system resonators and related methods and apparatus

US9537466B1 · kind B1 · utility

0Cited by

3References

20Claims

0Family size

Assignee

Analog Devices, Inc. · US

Inventors

Florian Thalmayr · Unterhaching, DE
Jan H. Kuypers · Cambridge, US
Andrew Sparks · Honolulu, US

Key dates

Filing date	Apr 30, 2013
Grant date	Jan 3, 2017
Priority date	—
Expiry date	May 31, 2035

Classification

Technology area (CPC H)Electricity
CPC primaryH03H9/02228
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Microelectromechanical systems (MEMS) resonators and related methods and apparatus are provided. A MEMS resonator may include a first portion and a second portion. The first portion may be configured to resonate, and the second portion may be configured to operate based on an energy trapping principle to prevent energy from traveling therethrough from the first portion. The MEMS resonator may be a Lamb wave resonator. The MEMS resonator may be anchorless. The MEMS resonator may have a side contacted by the anchor, wherein the anchor contacts greater than approximately 50% of the side.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.