Optical alignment tool
US9540690B2 · kind B2 · utility
6Cited by
0References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2014 |
| Grant date | Jan 10, 2017 |
| Priority date | — |
| Expiry date | Aug 28, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/6482
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is an inspection apparatus including: (a) a translucent or transparent plate having a bottom surface, at least a portion of the bottom surface having an opaque material printed thereon in a pattern having at least one transparent or translucent portion; and (b) a chamber disposed below the bottom surface, whereby light emitted from the chamber or through the chamber can pass through the at least one transparent or translucent portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.