Ionic thermal acid generators for low temperature applications
US9541834B2 · kind B2 · utility
3Cited by
22References
16Claims
0Family size
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Key dates
| Filing date | Nov 30, 2012 |
| Grant date | Jan 10, 2017 |
| Priority date | — |
| Expiry date | Sep 2, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/405
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
New ionic thermal acid generator compounds are provided. Also provided are photoresist compositions, antireflective coating compositions, and chemical trim overcoat compositions, and methods of using the compositions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.