Integrated circuit and method for fabricating an integrated circuit equipped with a temperature probe
US9543287B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Dec 20, 2013 |
| Grant date | Jan 10, 2017 |
| Priority date | — |
| Expiry date | Feb 23, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2225/06541
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
This integrated circuit comprises: The first and second ends are entirely buried to at least 5 μm depth inside the substrate and produced, respectively, in different first and second materials chosen for the absolute value of the Seebeck coefficient of the junction to be greater than 1 μV/K at 20° C. such that the combination of these first and second conductors forms a temperature probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.