Patent · US Active

Integrated circuit and method for fabricating an integrated circuit equipped with a temperature probe

US9543287B2 · kind B2 · utility

0Cited by
1References
9Claims
0Family size

Assignee

Inventor

Key dates

Filing dateDec 20, 2013
Grant dateJan 10, 2017
Priority date
Expiry dateFeb 23, 2034

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2225/06541
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

This integrated circuit comprises: The first and second ends are entirely buried to at least 5 μm depth inside the substrate and produced, respectively, in different first and second materials chosen for the absolute value of the Seebeck coefficient of the junction to be greater than 1 μV/K at 20° C. such that the combination of these first and second conductors forms a temperature probe.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.