Nanopore device including graphene nanopore and method of manufacturing the same
US9546995B2 · kind B2 · utility
5Cited by
1References
12Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 21, 2014 |
| Grant date | Jan 17, 2017 |
| Priority date | — |
| Expiry date | May 2, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C1/00087
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided are a nanopore device with resolution improved by graphene nanopores, and a method of manufacturing the same. The nanopore device includes: a first insulating layer; a graphene layer disposed on the first insulating layer and having a nanopore formed at a center portion of the graphene layer; and first and second electrode layers disposed respectively at both sides of the nanopore on a top surface of the graphene layer, wherein a center region of the first insulating layer is removed such that the center portion of the graphene layer is exposed to the outside.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.