Patent · US Active

Spatial light modulator based on metamaterial structure and preparation method thereof

US9547185B2 · kind B2 · utility

3Cited by

0References

12Claims

0Family size

Assignee

Suzhou Institute of Nano-Tech and Nano Sciences, Chinese Academy of Sciences · CN

Inventors

Qin Chen · Schenectady, US
Shichao Song · Suzhou, CN

Key dates

Filing date	Sep 29, 2014
Grant date	Jan 17, 2017
Priority date	—
Expiry date	Sep 29, 2034

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/932
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A spatial light modulator based on a metamaterial structure and a preparation method thereof. The spatial light modulator includes an array of optical function elements and a control circuit. The optical function element includes a metamaterial structure formed by a metal nanostructure layer and a metal reflector layer, with a medium layer and nonmetal conducting material layer being provided between the metal nanostructure layer and the metal reflector layer. The spatial light modulator is simple in structure, high in integration, easy in manufacture and low in cost. Furthermore, the spatial light modulator is capable of high-speed modulation, the depth of modulation is controlled easily, and a low drive voltage may be obtained.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.