Apparatus of inhalation type for stocking wafer at ceiling and inhaling type wafer stocking system having the same
US9550219B2 · kind B2 · utility
0Cited by
6References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 29, 2014 |
| Grant date | Jan 24, 2017 |
| Priority date | — |
| Expiry date | Dec 29, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/683
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Provided is an apparatus of an inhalation type for stocking a wafer at a ceiling and an inhaling type wafer stocking system having the same including a stocking system having a shelf that is fixed to a ceiling and supports a container in which a wafer is present; and an inhalation assembly that is installed in the stocking system so as to correspond to the shelf and is configured so as to inhale gas that leaks from the container.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.