Photoacoustic gas sensor with a helmholtz cell
US9551829B2 · kind B2 · utility
2Cited by
12References
4Claims
0Family size
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Key dates
| Filing date | Apr 19, 2012 |
| Grant date | Jan 24, 2017 |
| Priority date | — |
| Expiry date | Oct 7, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A photoacoustic detection device including a nanophotonic circuit including a first chip on which is formed at least one optical waveguide and in which is formed a set of cavities defining a Helmholtz resonator; at least one optical source capable of emitting an optical signal in a given wavelength range, capable of being modulated at an acoustic modulation frequency, this source being attached to the first chip; a second chip forming a cap for said cavities and including acoustic sensors; and electronic circuits for processing the output of the acoustic sensors formed in the first or the second chip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.