Wafer gripper with non-contact support platform
US9553010B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 25, 2015 |
| Grant date | Jan 24, 2017 |
| Priority date | — |
| Expiry date | Jul 28, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer transport system includes a substantially horizontal non-contact support platform for supporting a wafer substantially horizontally at a substantially fixed vertical distance from the platform. A wafer gripping device includes wafer grippers to grip a surface of the wafer that is opposite the non-contact support platform. Each of the wafer grippers is mounted on a vertically flexible holder to enable the wafer gripper to adapt to a height of the wafer above the wafer gripping device while maintaining a substantial horizontal rigidity of the vertically flexible holder so as to prevent horizontal motion of the wafer relative to the wafer gripping device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.